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Vacuum Pump(200v) - メーカー・企業と製品の一覧

Vacuum Pumpの製品一覧

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Dry Pump Energy-Saving Attachment ECO-SHOCK ES4A

Dry Pump Energy-Saving Attachment ECO-SHOCK ES4A

No decrease in exhaust speed! Significant reduction in power consumption of dry pumps is possible. [ULVAC]

ECO-SHOCK is an attachment that significantly reduces power consumption by being installed on dry pumps. The ES4A is ideal for applications that require frequent evacuation of the loading and unloading chamber, as well as for reducing the power consumption of dry pumps with long operating times at the target pressure, such as turbo molecular pump packs. It also helps to suppress heat generation in dry pumps, thereby reducing the power consumption of air conditioning equipment. 【Features】 - Contributes to energy saving in dry pumps - Effective with volumetric transfer type dry pumps - No decrease in pumping speed across all pressure ranges - Easy to install - Reduces heat generation and power consumption of air conditioning equipment For more details, please contact us or download the catalog.

  • Other pumps

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Dry Vacuum Pump GR Series

Dry Vacuum Pump GR Series

This is a pump with a simple structure designed for general industrial use. 【ULVAC】

The GR Series dry vacuum pumps are designed with a simple structure for general industry, based on the proven and reliable LR and HR series. They can be used for high-load applications such as repeated exhaust from atmospheric pressure to vacuum and continuous operation in high-pressure areas. They are ideal for exhausting load lock chambers that require high throughput. 【Product Lineup】 ○ GR60A ○ GR90A ○ GR180A For more details, please contact us or download the catalog.

  • Vacuum pump

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Optical Process Monitor Optius

Optical Process Monitor Optius

You can monitor the status of various plasma processes in real time. 【ULVAC】

The optical process monitor Optius can monitor the status of various plasma processes in real-time by measuring the emission spectrum of the plasma. It is ideal for MFC control in reactive sputtering and endpoint detection in etching. 【Specifications】 ○ Weight: Main unit (TSC): 4.9kg Expansion unit (ESC, 1ch): 1.3kg ○ Power supply: AC100–240V (50/60Hz) ○ Power consumption: 100W (when using 5 channels) ○ Operating environment: Temperature: 10 – 40°C, Humidity: 15 – 80% RH (without condensation) For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments
  • Other process controls

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Oil Rotary Vacuum Pump VD Series Ver.C

Oil Rotary Vacuum Pump VD Series Ver.C

Adopted forced oil supply method! This is a vacuum pump that can be used for a wide range of applications. [ULVAC]

The VD Series Ver.C is an oil-sealed rotary vacuum pump equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor. It features a two-stage vane design that achieves excellent ultimate pressure and has been optimized for low noise, making it suitable for a wide range of applications. One motor can accommodate a wide voltage range from 200-240V to 380-460V. The pump maintains stable exhaust speed even near atmospheric pressure, making it ideal for repeated continuous operation between atmospheric and vacuum conditions. 【Features】 ○ Equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor ○ One motor can accommodate a wide voltage range ○ Utilizes a forced lubrication system ○ Stable exhaust speed even near atmospheric pressure ○ Options available for special applications → In addition to the standard model, three variants (A specification, B specification, H specification) are available for special applications. For more details, please contact us or download the catalog.

  • Vacuum pump

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Oil Rotary Vacuum Pump VD Series

Oil Rotary Vacuum Pump VD Series

This is an oil rotary vacuum pump developed as a "low noise type pump." [ULVAC]

The VD series is a motor-directly coupled oil rotary vacuum pump developed as a "low-noise type pump." It can be used for a wide range of exhaust applications, from deposition and sputtering equipment to vacuum packaging machines, serving as the core pump for creating vacuum. There is a strong demand for "quietness" in vacuum pumps to improve the working environment. The VD series is a low-noise motor-directly coupled oil rotary vacuum pump developed in response to such requests. Additionally, it is designed with maintenance in mind, making routine maintenance and inspections very easy. It can be used in a wide range of applications, from laboratories that require quietness to various production lines. 【Features】 ○ Low noise ○ Excellent maintainability ○ Stable exhaust even at high pressures near atmospheric pressure For more details, please contact us or download the catalog.

  • Other pumps
  • Vacuum pump

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Abnormal Discharge Prevention Unit A2K Series

Abnormal Discharge Prevention Unit A2K Series

High throughput! Large capacity is possible with master-slave connections. [ULVAC]

The A2K series is an abnormal discharge prevention unit that applies a positive voltage pulse to a DC power supply in a reactive sputtering process to neutralize the charge on the target. By reducing abnormal discharges, it enables high power input. The A2K-20K and 40K can be operated in parallel with up to six units each. It is possible to synchronize the output pulses of multiple A2K units. It can be easily installed on existing equipment, achieving improved yield and throughput at a low cost. 【Features】 ○ High throughput ○ Reduced substrate damage ○ Suppressed substrate temperature ○ Simple connectivity ○ Adjustable reverse pulse frequency For more details, please contact us or download the catalog.

  • Power Supplies

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